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ホリ ヒサオ
Hori Hisao 堀 久男 所属 神奈川大学 理学部 理学科 神奈川大学大学院 理学研究科 理学専攻(化学領域) 職種 教授 |
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発表年月日 | 2017/06/28 |
発表テーマ | Efficient Photochemical Decomposition of Trifluoroacteic acid and its analogues with Electrolyzed Sulfuric Acid |
発表学会名 | 5th European Conference on Environmental Applications of Advanced Oxidation Processes (EAAOP5) |
学会区分 | 国際学会 |
発表形式 | 口頭(一般) |
単独共同区分 | 単独 |
開催地名 | Prague, Czech |
発表者・共同発表者 | Hisao Hori, Ryo Manita, Kenta Yamamoto, Shuzo Kutsuna, Masaaki Kato |
概要 | Electrolyzed sulfuric acid, a new chemical reagent prepared by electrolysis of aqueous sulfuric acid, has been used in the electronics industry since the early 2010s to remove organic materials adhered to semiconductor wafers used for the manufacture of electronic devices. In the present study, we elucidated the oxidizing species in electrolyzed sulfuric acid, and used it to photochemically decompose trifluoroacetci acid (CF3COOH) and its analogues (C2F5COOH and C3F7COOH) in water. |